The multi-mode gas cluster ion source (GCIS) is designed to operate in both Ar n + cluster and Ar + monatomic modes making it suitable for sputter cleaning and depth profiling organic, inorganic ...

The ion source can also be operated in the more traditional monatomic Ar + mode, which is more appropriate to depth profiling inorganic samples. Research has revealed that the sputter yield of this ...

The ion source can be operated in monatomic Ar + ion mode for conventional depth profiling inorganic and metallic samples. This yields a much higher sputter in this class of materials, which is known ...