Photolithography uses light to transfer a pattern of features from a mask to a light-sensitive chemical photoresist on a semiconductor wafer. As the pattern is transferred, it is reduced in scale ...

On top of this is placed a chemical called photoresist. Flashing a pattern of light (like the grid of light and dark that's formed by a window screen) on the photoresist turns any parts exposed to ...

The process starts with the substrate being coated with a light-sensitive photoresist. A photomask, which contains the desired pattern, is then aligned above the substrate. Ultraviolet (UV) light is ...

Lam's dry resist approach overcomes the biggest challenges ... enabling the most challenging patterns to better adhere to the wafer and improving performance and yield. In addition, it offers ...