Plasmatreat cold plasma systems clean, activate surfaces and apply nanocoatings for dielectric barriers and more.

Fig. 2: General patterning and etching process steps in a fab. Source: Wikipedia Basically, an advanced etch tool is a standalone system with a chamber. In operation, a wafer is inserted in the ...

In a separate development, A*STAR has devised a new plasma etching process for microelectromechanical systems (MEMS). A*STAR has developed a two-step plasma etching process, which produces vias with ...

Through via hole fabrication process by deep reactive-ion etching (DRIE): (a) Sample cleaning; (b) Deposition of mask material; (c) Transfer of desired pattern; (d) Desired pattern achieved; (e) ...

Similar to how a ship rusts when exposed to seawater, plasma used during the etching process continuously reacts with the internal components of the equipment, leading to corrosion and contamination.

What is Atomic Layer Etching? Atomic layer etching (ALE) is a highly controlled and selective etching technique that removes material layer by layer at the atomic scale. It is a cyclic process that ...

and hardware design inside a single process chamber, the FlexAL atomic layer deposition (ALD) system provides a wide range of optimized high-quality plasma ALD and thermal ALD procedures. The ALD ...

It also noted that to improve productivity and process yield ... more powerful and new semiconductor devices," adding that "plasma etching technology will play a key role in next-generation ...