Extreme ultraviolet lithography extends photolithography ... There is also the question of how to generate EUV light. As mentioned above, the mirrors in the projection optics only reflect 72% ...
tom's Hardware on MSN4mon
Corning's Extreme ULE glass debuts for next-gen High-NA EUV chipmakingAs extreme ultraviolet lithography tools ... which is separated from the photomask. The light is carried by a set of ...
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