惯性导航简介

Below is a cross-sectional diagram of a silicon seismic mass suspended by 4 identical beams (only three beams are shown in Figure 3 and schematic is not drawn to scale). The length, width and thickness of each beam are the same. The bottom of the seismic mass forms a capacitor C1 with the substrate support in which the air gap go is 3µm. When the seismic mass experiences acceleration in the z direction, it will deflect downwards and the airgap of C1 will be reduced. However, this airgap cannot b

Measuring earthquakes: magnitude and seismic intensity